张思源,张鑫,彭浩然,王彦军,阴荫,张康.高纯纳米无定形硼粉的制备研究[J].热喷涂技术,2022,14(3):23~29. |
高纯纳米无定形硼粉的制备研究 |
Study on Preparation of High Purity Nano AmorphousBoron Powder |
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DOI:DOI 10.3969/j.issn.1674-7127.2022.03-003 |
中文关键词: 等离子体 高纯 纳米硼粉 无定形 |
英文关键词:Plasma High purity Nano boron powder Amorphous |
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中文摘要: |
本文采用等离子体技术制备了高纯纳米无定形硼粉, 对不同氢气与 BCl3 气体流量比例、 反应气体总流量
及冷却气流量等工艺参数对纯度、 粒度及晶型的影响进行了探究。 结果表明, 在一定范围内, 硼粉纯度随着 H2
通入量在 BCl3、 H2 通入量比例中的上升而增加, 硼粉粒度随着反应气体(BCl3 和 H2) 总通入量和冷却气流量的
上升而下降, 硼粉晶型随着冷却气流量的上升从晶体硼逐渐转变为无定形硼。 通过上述影响规律, 确定 BCl3、 H2
通入量比例 1:4、 反应气体总通入量 2.25 m3/h、 冷却气流量 0.9 m3/h 为较优工艺参数, 通过确定的较优工艺参数制
备高纯纳米无定形硼粉, 获得了纯度高达 99.97 wt.%、 主粒径 30~100 nm、 平均粒径 51.06 nm 的硼粉。 |
英文摘要: |
In this paper, high-purity nano amorphous boron powder was prepared by plasma technology. The
effects of different process parameters such as the flow ratio of hydrogen and BCl3, the total flow rate of reaction
gas and the flow rate of cooling gas on the purity, particle size and crystal form were investigated. The results
showed that, within a certain range, the purity of boron powder increased with the increase of hydrogen flow rate
in the proportion of BCl3 and H2 flow rate, the particle size of boron powder decreased with the increase of the
total flow rate of reaction gas (BCl3 and H2) and the flow rate of cooling gas, and the crystal form of boron powder
gradually changed from crystalline boron to amorphous boron with the increase of the flow rate of cooling gas.
According to the above influence rules, the optimal process parameters were determined as follows, the proportion
of BCl3 and H2 inflow was 1:4, the total amount of reaction gas inflow was 2.25 m3/h, and the cooling gas flow was
0.9 m3/h. High purity nano amorphous boron powder was prepared by the optimized process parameters, and the
boron powder with a purity of 99.97 wt.%, a main particle size of 30~100 nm and an average particle size of 51.06
nm was obtained. |
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